Chamber size:φ2600*H4100mm Vertical type
3 sheets/chamber of 1300×3100×3mm (thickness) stainless steel sheet can be coating at one time,Also can be coat the size less than 1900×3700×50mm (thickness) frame and parts.
TiN(gold), rose, coffee, zirconium, gun black, champagne, etc.
Main Technical Parameters:(Cleaning,Empty chamber,cold state,new equipment)
(1). Ultimate vacuum: 5x10-4 Pa
(2). Pressure retention: from limit to 5× 10-1pa ≥1h.
(3).Pump speed: From atmos. to 6.7x10-3Pa＜15minutes
Configuration of the Vacuum Coating Machine:
Vertical, upper cover open, material SUS304, double layer, with double layer cooling water jacket, 36 arc source holes, 4 observation Windows.
Hoisting type rotary frame, both revolution and rotation, 1set of rotary frame,can fitting two kinds of fixtures, 1）one time can install 3 pieces stainless steel sheet of 1300×3100×3mm(thickness); 2) can also be coating other parts, less than 1900×3700×50mm.
Stainless steel 304
2Sets of SUS304 stainless steel liner plate,thickness is 0.8mm.
2sets of JKT-1000 diffusion pump groups,contains 2pcs of ZJP-1200 Roots pumps,8pcs 2X-70pumps,2pcs 2X-30pumps,Pipe and valve use high quality steel to manufacturing.
Using far infrared stainless steel tube heater, heating power 48KW, power transmission using contactless relay; Temperature measurement using intelligent temperature control instrument to control the temperature , heating temperature 200℃.
36pcs dynamoelectric arc strike
Arc power source
36 sets maximum current 250A and operating current below 150A
Bias power source
40KW bias power supply, two gears: 1000V,40A one gear; 500V 80A another gear.
Gas charging system
4 pcs qixing huachuang mass flow controllers with a flow rate of 2000sccm.
1pc 4 channels mass flow display
1pc composite vacuum gage
Manual + automatic two types; Fully automatic Japanese Omron PLC+ 15-inch touch screen; Using special coating process system, an independent full set of complete manual system.
Each unit is individually controlled.