Capacity:
Chamber size:φ2600*H4100mm Vertical type
3 sheets/chamber of 1300×3100×3mm (thickness) stainless steel sheet can be coating at one time,Also can be coat the size less than 1900×3700×50mm (thickness) frame and parts.
Coating colors:
TiN(gold), rose, coffee, zirconium, gun black, champagne, etc.
Main Technical Parameters:(Cleaning,Empty chamber,cold state,new equipment)
(1). Ultimate vacuum: 5x10-4 Pa
(2). Pressure retention: from limit to 5× 10-1pa ≥1h.
(3).Pump speed: From atmos. to 6.7x10-3Pa＜15minutes
Configuration of the Vacuum Coating Machine:
Item | Material/Model | Description |
Vacuum chamber | Φ2600×H4100mm | Vertical, upper cover open, material SUS304, double layer, with double layer cooling water jacket, 36 arc source holes, 4 observation Windows. |
Hoisting type rotary frame, both revolution and rotation, 1set of rotary frame,can fitting two kinds of fixtures, 1）one time can install 3 pieces stainless steel sheet of 1300×3100×3mm(thickness); 2) can also be coating other parts, less than 1900×3700×50mm. | ||
Liner plate | Stainless steel 304 | 2Sets of SUS304 stainless steel liner plate,thickness is 0.8mm. |
Pump system | JKT-1000 Pump group | 2sets of JKT-1000 diffusion pump groups,contains 2pcs of ZJP-1200 Roots pumps,8pcs 2X-70pumps,2pcs 2X-30pumps,Pipe and valve use high quality steel to manufacturing. |
Heating system | Stainless steel | Using far infrared stainless steel tube heater, heating power 48KW, power transmission using contactless relay; Temperature measurement using intelligent temperature control instrument to control the temperature , heating temperature 200℃. |
Arc source | Cathod Φ100×40 | 36pcs dynamoelectric arc strike
|
Arc power source | 36 sets maximum current 250A and operating current below 150A | |
Bias power source | 40KW bias power supply, two gears: 1000V,40A one gear; 500V 80A another gear. | |
Gas charging system | 4 pcs qixing huachuang mass flow controllers with a flow rate of 2000sccm. | |
1pc 4 channels mass flow display | ||
Vacuum gauge | 1pc composite vacuum gage
| |
Control system | Manual + automatic two types; Fully automatic Japanese Omron PLC+ 15-inch touch screen; Using special coating process system, an independent full set of complete manual system. | |
Waterway control | Stainless steel | Each unit is individually controlled. |
