1.Capacity：
2 to 3 sheets/furnace of 1220×2440×3mm (thickness below) stainless steel plate can be coating at one time. Can also be coating less than 1300×3100×50mm (thickness) frame and spare parts.
2.Coating Rang:
TiN(Gold),Rose, coffee, zirconium, gun black, champagne,etc
3.Equipment parameters:
1）The ultimate vacuum degree is 7× 10-4pa (new equipment, empty furnace, cold state).
2）Pressure retention: from limit vacuum to 0.5 Pa, no less than 1 hour.
3）Working cycle: pumping from atmosphere to 6.8× 10-3pa ≤15min. (new equipment, empty furnace, cold state)
Item | Description | Quantity | ||
Vacuum Chamber |
Chamber size | Horizontal：Ф2200×L3600mm | ||
Vacuum chamber structure | Adopt horizontal type vacuum chamber, the material is SUS304 stainless steel; Double-layer cooling water jacket, there is a diversion channel in the water jacket to ensure even indoor temperature; 32 arc-source holes are left on the sidewall, 4 observation holes, heating holes are left on the periphery, filling holes are left on the bottom, etc. |
1pcs | ||
liner plate | Stainless steel liner with the thickness of 0.8mm | 2sets | ||
Rotation system | Squirrel cage type frame structure, adjustable rotation speed, equipped with indoor squirrel cage positioning trolley |
2sets | ||
Pump System |
Diffusion pump | Use KT-1000 Diffusion pump 2set |
2 sets | |
Roots pump |
ZJP-1200 roots pump |
2 pcs | ||
Machinery pump |
2X-15 Machinery pump |
2 pcs | ||
Slide valve pump |
H150 Slide valve pump |
2 pcs | ||
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