2 to 3 sheets/furnace of 1220×2440×3mm (thickness below) stainless steel plate can be coating at one time. Can also be coating less than 1300×3100×50mm (thickness) frame and spare parts.
TiN(Gold),Rose, coffee, zirconium, gun black, champagne,etc
1）The ultimate vacuum degree is 7× 10-4pa (new equipment, empty furnace, cold state).
2）Pressure retention: from limit vacuum to 0.5 Pa, no less than 1 hour.
3）Working cycle: pumping from atmosphere to 6.8× 10-3pa ≤15min. (new equipment, empty furnace, cold state)
Vacuum chamber structure
Adopt horizontal type vacuum chamber, the material is SUS304 stainless steel; Double-layer cooling water jacket, there is a diversion channel in the water jacket to ensure even indoor temperature; 32 arc-source holes are left on the sidewall, 4 observation holes, heating holes are left on the periphery, filling holes are left on the bottom, etc.
Stainless steel liner with the thickness of 0.8mm
Squirrel cage type frame structure, adjustable rotation speed, equipped with indoor squirrel cage positioning trolley
Use KT-1000 Diffusion pump 2set
ZJP-1200 roots pump
2X-15 Machinery pump
Slide valve pump
H150 Slide valve pump