Equipment Brief
IKS-OPT2700 is designed for large area optical film coating, It is electron-beam evaporative coating machine. The coating machine system is consist of vacuum chamber, vacuum pump, Vacuum detection and control, substrate heating system, electron beam evaporation system, ion source assisted deposition system, resistance evaporation system, film thickness monitoring system, working gas volume flow control system, work piece rotation system and automatic coating controlled by PLC.
The evaporation material is commonly used of rare metals, like YF3(yttrium fluoride), F3Pr(praseodymium fluoride), Ge(germanium), ZnS(zinc sulfide), MgF2(magnesium fluoride), TiO2(titanium dioxide), SiO2(silicon dioxide),ZrO2(zirconia), Co(cobalt), Ga(gallium), Se(selenium)and other metals. Cu(Copper), Mo(molybdenum), Si(silicon), Ge(germanium)and other metals are commonly used in the optical materials of reflectors.
It can be coating visible light color film, aluminum reflective film, AF anti-fingerprint film, low melting point organic film, visible light spectroscopic film, visible light anti-reflection film, etc
Equipment Parameters
Chamber Size | Ф2700×H1670mm，10.5m3 | Carousel | 2650*H420mm |
Vacuum degree | ultimate vacuum:6×10-4Pa(No load for 24 hours without heating) | Weight | 8000kg,Floor weight﹥1000kg/m2 |
Leak rate | ＜4×10-3Pa×L/S(Helium leak checking) | Temperature | At room temperature to 250 ℃, the temperature uniformity ±5% |
Working Vacuum | 6×10-3Pa(Automatic process start-up) | Power Supply | Three-Phase, 380V，50Hz，60-100KW |
Low Vacuum | 10 minutes＜10Pa | Water Cooling | The flow of Chamber＞4000L/H,The flow of Pump＞1800L/H,The flow of Freezer＞1600L/H |
High Vacuum | 6 minutes＜8×10-3Pa | Warm Water | Evaporation Source1800L/H,35-60℃ |
Vacuum measurement | Whole-process monitoring and real-time point collection | floor space | L6×w5.5×H3.5m |
Application | Eyeglasses, reflective mirror, mobile phone backboard, protective cover, optical communication, optical display, etc | ||
Application
