Equipment parameter
chamber size | φ2000*H4200 | Coating space | 18m3 |
Working power/frequency | 380V/50Hz | actual power | 50KW |
Technical | ARC | Arc quantity | 30pcs |
ultimate pressure | 5.0*10-4Pa | leak rate | <10-3Pa.L/s |
Pumping time | Atm to 4*10-3 <20mins | Arc source quantity | 30pcs |
Turntable structure | up rotation | Vacuum chamber structure | Top open |
Power source | Arc power source | Pumping system | Diffusion pump,Roots pump,Rotory pump,holding pump |
Coating cycle | 10-30mins/furnace | overall size | L4000*W3200*H2200MM |
Yield | According to the parts | complementary condition | Circulating water pressure：2-3KG/CM3 water volume：40T/H air compression：4-6 KG/CM3
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Control type | Manual + semi-automatic + automatic integration/touch screen +PLC Self - developed special software for coating | Working gas | Ar、N2、O2、C2H2. etc. |
Note | Vacuum chamber size, peripheral size, equipment appearance can be customized according to customer's product or special process requirements | ||