Equipment Brief
The high light conductive glass coating line of ITO produced by IKS PVD company is a high-tech product made by sputtering indium-tin Oxide target material and other metal target material on ultra-thin glass with plane magnetron technology in a highly purified factory environment. Widely used for liquid crystal displays (LCD), solar cells, microelectronics ITO conductive film glass, optoelectronics, and all kinds of optical field, in acrylic sheet, glass, ceramics, following, computer, PC, PET, magnetron sputtering on the surface of high quality, multi-function metal film, anti interference (EMI) electromagnetic shielding film, reaction film, composite membrane, transparent conductive film (ITO), anti-reflective film (AR), reflective film, etc. With a large throughput continuous magnetic-controlled metallization production, the use of the industry's most advanced production technology, greatly improve the film and workpiece bonding force, adhesion.
Equipment Parameters
Chamber
| 4pcs
| Chamber of in/out glass frame | L2600×W300×H2200mm | 1.72m3 |
Gas storage chamber | Φ500×H1600mm | 2.51m3 | ||
Occupation area | 30m×10m | Glass transmission chamber | L2500×W200×H2000mm | 1.00m3 |
coating chamber | L1300×W250×H2200mm | 0.72m3 | ||
Size of glass frame coating window | L2300×H1600 | Frequency of glass in/out | 5 mins | |
Technical | Magnetron sputtering | Power | DC power supply 40KW, MF power supply 40KW | |
Sputtering target | 14pcs | 4pcs ITO planar targets, 8pcs Al cylindrical targets, 1pc Cu cylindrical target, and 1pc SS cylindrical target | ||
Application | Liquid crystal displays (LCD), solar cells, microelectronics ITO conductive film glass, optoelectronics, and various optical fields glass continuous coating | |||