Hobs PVD coating equipment picture
Hobs PVD coating equipment parameter
Vacuum chamber size | Φ1000×H1100 |
Ultimate Vacuum degree | 5.0×10-4 |
Pumping time | Atm-4×10-3<20mins |
leak rate | <10-3Pa.L/s |
Overall size | L4000×W1900×H2300 |
Turntable structure | Down rotation |
Plane arc quantity | 4pcs |
Coating time | 5~8hours |
Control system | PLC+touch screen Manual, automatic two sets of completely independent control system |
Hardware | Turbomolecular pump, bias power supply |
Total power | 80KW |
