Drills PVD Vacuum Coating Machine

substrate max diameter*quantity

φ150*12个

pumping time

atm to 6X10^-3 <15mins

working voltage/frequency

380V/50Hz

real power

70KW

Technology

HCD+ARC

target quantity

12pcs

ultimate pressure

5.0*10^-4Pa

leak rate

<10^-3Pa.L/s

standard coating

TiN、CrN、AlTiN等

optional coating

TiAlCrN etc.

turntable structure

down structure

chamber construction

Vertical single door

Power source type

Arc power, pulse bias power,E-gun power

Pump system

Turbo molecular pump, Roots pump, monoblock pump

Coating cycle

3-6 hours/furnace

Overall size

L4200*W3200*H2200MM

 Yield/furnace

milling cutterφ10*70  880pcs  

Knife particlesφ18*6   6400  

hobsφ80*80  64  

models 500KG

match condition

• Circulating water pressure：2-3KG/CM3

• water volume：10T/H  

compressed air：4-6 KG/CM3

Control method

manual+semi-automatic+

• fully-automatic integrated

/touch screen+PLC

Self - developed coating software

working gas

Ar、N²、O²、C²H² 

Remark

Vacuum chamber size, overall size, equipment appearance can be customized according to customer products or special process requirements