PVD coating machine picture
PVD coating machine parameters
Chamber size | φ1200*H950 | effective space | φ650*H600 |
substrate max diameter*quantity | φ150*12个 | pumping time | atm to 6X10-3 <15mins |
working voltage/frequency | 380V/50Hz | real power | 70KW |
Technology | HCD+ARC | target quantity | 12pcs |
ultimate pressure | 5.0*10-4Pa | leak rate | <10-3Pa.L/s |
standard coating | TiN、CrN、AlTiN等 | optional coating | TiAlCrN etc. |
turntable structure | down structure | chamber construction | Vertical single door |
Power source type | Arc power, pulse bias power,E-gun power | Pump system | Turbo molecular pump, Roots pump, monoblock pump |
Coating cycle | 3-6 hours/furnace | Overall size | L4200*W3200*H2200MM |
Yield/furnace | milling cutterφ10*70 880pcs Knife particlesφ18*6 6400 hobsφ80*80 64 models 500KG | match condition |
compressed air：4-6 KG/CM3
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Control method | manual+semi-automatic+
/touch screen+PLC Self - developed coating software | working gas | Ar、N2、O2、C2H2 |
Remark | Vacuum chamber size, overall size, equipment appearance can be customized according to customer products or special process requirements | ||
