INTRODUCTION
The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas flows over a wide pressure range with source gas delivery pressure as low as 4 Torr.
This πMFC is the latest in MKS products designed specifically for SDS and VAC ® source gases serving the ion implantation industry. The patented valve and sensor designs offer exceptional zero stability and accuracy for all flow conditions while maintaining the ability to rapidly achieve set point and repeatably control the gas flow. Standard-sized MFC footprint and control I/O are compatible with existing gas lines for easy integration and operation.
FEATURES & BENEFITS
◆ Maximizes SDS source gas utilization reducing bottle changes resulting in higher tool uptime and lower cost-of-ownership
◆ Repeatedly controls low gas flows allowing for reduced gas consumption using parameters optimized for implanter source applications
◆ Digital control loop provides rapid response to set point minimizing process cycle time
◆ Increases tool uptime through reduction of “No Problem Found”: MFC replacements
— Included embedded diagnostics and software allowing users to check MFC functionality without removing the MFC
—E-diagnostics through embedded Ethernet interface allows monitoring performance parameters during operation
◆ Direct form-fit-function replacement for most common MFCs
◆ Reduces inventory costs through multi-gas, multi-range capability
◆ Straightforward configuration and diagnostics through Ethernet interface
— Uses standard web browser – no special software required
— Includes remote PC application
◆ Bright rotatable LED display provides easy viewing of flow rate, gas type, full scale flow range, temperature and Ethernet address
DIMENSIONAL DRAWING AND PINOUTS
SPECIFICATION
| Performance | ||
| Full Scale Ranges (N2 equivalent) | 2– 20 sccm | |
| Inlet Pressure Range | 4 – 1200 Torr (with vacuum at the outlet) | |
| Normal Operating Pressure Differential (N2 equivalent) | <10 Torr at F.S. flow (with vacuum at the outlet) | |
| Maximum Purge Pressure | 150 psig | |
| Burst Pressure | 1500 psig | |
| Control Range | 2 to 100% of F.S. | |
| Typical Accuracy | ±1% of set point for >10 to 100% F.S. and ±0.2% of F.S. for 2 to 10% of F.S. at inlet pressures >20 Torr | |
| Repeatability | 0.2% of F.S. | |
| Resolution | 0.1% of Reading | |
Temperature Coefficients | Zero | ±0.08% of F.S./°C |
| Span | ±0.08% of Rdg/°C | |
Controller Settling Time (per Semi Guideline E17-0600) | <2 sec. typical above 10% of F.S. at inlet pressures >10 Torr | |
Warm-up Time (to within 0.2% of F.S. of steady state performance) | <30 min. | |
| Normal Operating Temperature | 10 to 50°C | |
| Storage Humidity | 0 to 95% Relative Humidity, no condensing | |
| Storage Temperature | -20 to 65°C | |
| Temperature Display | 0 to 100°C | |
| Temperature Readout Units | °C | |
| Temperature Accuracy | ±2°C | |
| Temperature Resolution | 0.1°C | |
| Mechanical | ||
| Fittings | Swagelok ® 4 VCR ® | |
| Display | 4 digits for value, 4 characters for unit | |
| Leak Integrity | External (scc/sec He) | <1x10 -10 |
| Through Closed Valve | <1.0% of FS at 25 psig to atmosphere | |
Wetted Materials Standard | 316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, NiTi | |
| Surface Finish | 5 microinch average Ra | |
| Weight | Less than 2 lbs. (0.9 kg) | |
| Electrical | ||
| Connectors | Analog (power & I/O) | 9 pin D male or 15 pin D male |
| Diagnostics | Ethernet | |
| Input Voltage | 15-24 VDC ±5%VDC @ 350mA peak, 250 mA steady state | |
| Set Point Command Signal | 0 to 5 VDC | |
| Output Signal | 0 to 5 VDC | |