Low Pressure ΠMFC Mass Flow Controller - PFC-20

Low Pressure ΠMFC Mass Flow Controller - PFC-20

The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas...
Chat Now

Product Details


INTRODUCTION


The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas flows over a wide pressure range with source gas delivery pressure as low as 4 Torr.


This πMFC is the latest in MKS products designed specifically for SDS and VAC ® source gases serving the ion implantation industry. The patented valve and sensor designs offer exceptional zero stability and accuracy for all flow conditions while maintaining the ability to rapidly achieve set point and repeatably control the gas flow. Standard-sized MFC footprint and control I/O are compatible with existing gas lines for easy integration and operation.




FEATURES & BENEFITS


◆ Maximizes SDS source gas utilization reducing bottle changes resulting in higher tool uptime and lower cost-of-ownership

◆ Repeatedly controls low gas flows allowing for reduced gas consumption using parameters optimized for implanter source applications

◆ Digital control loop provides rapid response to set point minimizing process cycle time

◆ Increases tool uptime through reduction of “No Problem Found”: MFC replacements

   — Included embedded diagnostics and software allowing users to check MFC functionality without removing the MFC

   —E-diagnostics through embedded Ethernet interface allows monitoring performance parameters during operation

◆ Direct form-fit-function replacement for most common MFCs

◆ Reduces inventory costs through multi-gas, multi-range capability

◆ Straightforward configuration and diagnostics through Ethernet interface

    — Uses standard web browser – no special software required

    — Includes remote PC application

◆ Bright rotatable LED display provides easy viewing of flow rate, gas type, full scale flow range, temperature and Ethernet address




DIMENSIONAL DRAWING AND PINOUTS


blob.png




SPECIFICATION


Performance
Full Scale Ranges (N2 equivalent) 2– 20 sccm
Inlet Pressure Range 4 – 1200 Torr (with vacuum at the outlet)
Normal Operating Pressure Differential (N2 equivalent)<10 Torr at F.S. flow (with vacuum at the outlet)
Maximum Purge Pressure 150 psig
Burst Pressure1500 psig
Control Range 2 to 100% of F.S.
Typical Accuracy  

±1% of set point for >10 to 100% F.S. and 

±0.2% of F.S. for 2 to 10% of F.S.

at inlet pressures >20 Torr

Repeatability0.2% of F.S.
Resolution0.1% of Reading

Temperature 

Coefficients

Zero±0.08% of F.S./°C
Span±0.08% of Rdg/°C

Controller Settling Time (per Semi Guideline E17-0600)

<2 sec. typical above 10% of F.S. at inlet pressures >10 Torr

Warm-up Time 

(to within 0.2% of F.S. of steady state performance)

<30 min.
Normal Operating Temperature10 to 50°C
Storage Humidity0 to 95% Relative Humidity, no condensing
Storage Temperature -20 to 65°C
Temperature Display0 to 100°C
Temperature Readout Units  °C
Temperature Accuracy±2°C
Temperature Resolution0.1°C
Mechanical
Fittings  Swagelok ® 4 VCR ®
Display4 digits for value, 4 characters for unit
Leak IntegrityExternal (scc/sec He) <1x10 -10
Through Closed Valve<1.0% of FS at 25 psig to atmosphere

Wetted Materials 

Standard

316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 

316 S.S., Elgiloy, KM-45, NiTi

Surface Finish5 microinch average Ra
Weight  Less than 2 lbs. (0.9 kg)
Electrical
Connectors Analog (power & I/O) 9 pin D male or 15 pin D male
DiagnosticsEthernet
Input Voltage15-24 VDC ±5%VDC @ 350mA peak, 250 mA steady state
Set Point Command Signal0 to 5 VDC
Output Signal0 to 5 VDC


Inquiry