General Purpose Mass Flow Controller - MKS 1179C

General Purpose Mass Flow Controller - MKS 1179C

The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 mass flow controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as...
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Product Details


INTRODUCTION


The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 mass flow controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.


The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.



FEATURES & BENEFITS


◆ Patented 1 sensor design provides exceptional zero stability

◆ Full Scale flow ranges from 10 sccm to 20 slm for precise and repeatable flow measurement and control

◆ Percent of Full Scale accuracy for analog configurations

◆ Fast warm-up time minimizes expensive production downtime

◆ Compatible with earlier MKS MFC and power supply/readout modules

◆ Rigorous design and testing includes MTBF analysis and STRIFE testing to ensure long-term performance

◆ Surface finish of wetted stainless surfaces, cleanroom processing, and minimal use of elastomer seals enable use in demanding clean processes

◆ Two year warranty ensures quality and customer satisfaction



STRUCTURE

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A cross section diagram of a 1179C Mass-Flo Controller



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Flow Accuracy and Repeatability 

The above graph shows the typical flow accuracy and repeatability ofanalog MFCs in the 1179C family. Measurements were made using theMKS Instruments Califlow ® Primary Standard Flow Calibrator over a 10 day period.




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Zero Stability 

The above graph shows the excellent zero and span stability of the 1179C sensor used in the 1179 family. The instruments were powered on and randomly tested for zero and span drift over a 19 month period.




SPECIFICATION


Full Scale Ranges (N 2 equivalent) 

10, 20, 50, 100, 200, 500, 1000, 2000, 5000,

10000, 20000 sccm

Maximum Inlet Pressure150 psig

Normal Operating Pressure 

Differential (with atmospheric 

pressure at the MFC outlet)

10 to 5000 sccm10 to 40 psid
10000 to 30000 sccm15 to 40 psid
Control Range2% to 100% of F.S.

Accuracy (analog) (including non-linearity, hysteresis, and  non-repeatability 

referenced to 760 mmHg and 0°C) 

±1.0% of F.S.
Repeatability±0.2% of F.S.
Resolution0.1% of F.S.
Temperature CoefficientsZero <0.05% of F.S./°C
Span<0.08% of Rdg./°C
Warm-up Time  (to within 0.2% of F.S. of steady state performance)<2 min 
Controller Settling Time (per SEMI Guideline E17-91)<2 sec
Pressure Coefficient <0.02% of Rdg./psi
Normal Operating Temperature Range 0°C to 50°C
Input Voltage RequiredMax. current at start-up (first 2 sec)±15 VDC (±5%) @ 200 mA
Typical current at steady state±15 VDC (±5%) @ 100 mA
Set Point Command Signal0 to 5 VDC from <20K Ω
Output Signal 0 to 5 VDC into >10K Ω
Output Impedance <1 Ω

Connector Types 

Analog 

9-pin or 15-pin Type “D”

(The 15-pin Type “D” connector is electronically 

compatible with other MKS flow controllers. 

Consult Applications Engineering for details.)

Wetted MaterialsStandard316L S.S., Viton ® , nickel
Optional (seals and valve seat) Buna-N, Neoprene ® , Kalrez ®
Leak IntegrityExternal (scc/sec He) <1 x 10 -9
Through closed valve

<1.0% of F.S. at 40 psig inlet to atmosphere

(To assure no flow-through, a separate positive shut-off valve is recommended.)

Fittings (compatible with)

Swagelok ® 4 VCR ® , Swagelok ® 4 VCO ® ,

 ¼'' Swagelok 

ComplianceCE


























































DIMENSIONAL DRAWING

Note: Unless otherwise specified,dimensions are nominal values in inches(mm referenced).

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