Compatible Vacuum Gauges And Controllers CDG045D 0.05~1000Torr / Mbar

Compatible Vacuum Gauges And Controllers CDG045D 0.05~1000Torr / Mbar

INTRODUCTION INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with...
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Product Details


INTRODUCTION


INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding vacuum applications.


The INFICON  SKY  CDG045D Capacitance Diaphragm Gauges are direct replacements for the Oerlikon Leybold  CTR 101 transmitters.  Get the original from the manufacterer with global support and solutions for all applications.




BENEFITS


◆ Fully compatible with CTR 101 transmitters

◆ Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption

◆ Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points

◆ Easy one push button or remote signal zero command, zero offset adjustable

◆ Diagnostic port for quick service and maintenance

◆ Two year warranty, longer life time with advanced heating concept and gauge protection

◆ No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications

◆ Compliance & standards: CE, EN, UL, SEMI, RoHS




TYPICAL APPLICATIONS


◆ Etch, CVD, PVD and other semiconductor production processes

◆ Chemical and corrosive vacuum processes

◆ General thin film and vacuum processes

◆ Reference sensor for monitoring of test instruments according to international standards

◆ Transfer standard for traceability measurements




SPECIFICATION


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Type


1000 Torr ,1100 mbar

500 ... 1Torr / mbar

0.5...0.05 Torr / mbar

Accuracy

% of reading

0.15

0.15

0.15

Temperature effect

on zero

percent FS/°C

0.0025

0.0025

0.0025

on span

% of reading / °C

0.01

0.01

0.01

Resolution

percent FS

0.003

0.003

0.003

Pressure, max.

kPa (absolute)

400

260

130

Lowest reading

percent FS

0.01

0.01

0.01

Lowest suggested 

reading

percent FS

0.05

0.05

0.05

Lowest suggested 

control pressure

percent FS

0.5

0.5

0.5

Temperature

Operation (ambient)

°C

+10 … +40

+10 … +40

+10 … +40

Bakeout at flange

°C

≤110

≤110

≤110

Storage

°C

–20 … +65

–20 … +65

–20 … +65

Supply voltage


+14 … +30 VDC or ±

15 V (±5%)

+14 … +30 VDC or ±

15 V (±5%)

+14 … +30 VDC or ±

15 V (±5%)

 Power consumption

During heat up

W

≤12

≤12

≤12

At operating temperature

 W

 ≤8

 ≤8

 ≤8

Output signal (analog)

V (dc)

0 … +10

0 … +10

0 … +10

 Response time

 ms

 30

 30

 130/30

Degree of protection


IP 40

IP 40

IP 40

Standards

 CE conformity


EN 61000‑6‑2/-6-3, 

EN 61010 & RoHS

EN 61000‑6‑2/-6-3, 

EN 61010 & RoHS

EN 61000‑6‑2/-6-3, 

EN 61010 & RoHS

 ETL certification


UL 61010‑1, CSA 

22.2 No.61010‑1

UL 61010‑1, CSA 

22.2 No.61010‑1

UL 61010‑1, CSA 

22.2 No.61010‑1

 SEMI compliance


 SEMI S2

 SEMI S2

 SEMI S2

 Electrical connection


D-sub, 15 pole, male

D-sub, 15 pole, male

D-sub,15 pole, male

 Setpoint





 Number of setpoints


 2 (SP1,SP2)

 2 (SP1,SP2)

 2 (SP1,SP2)

 Relay contact

 V(dc)

 ≤30

 ≤30

 ≤30

 Hysteresis

 percent FS

 1

 1

 1

 Diagnostic port

 Protocol


RS232-C

RS232-C

RS232-C

 Read


pressure, status, ID

pressure, status, ID

pressure, status, ID

 Set


set points, filter, zero 

adjust, factory reset, 

DC offset

set points, filter, zero 

adjust, factory reset, 

DC offset

set points, filter, zero 

adjust, factory reset, 

DC offset

Materials exposed to 

vacuum


luminum oxide ceramic 

(AI2O3), stainless steel (AISI 316L)

luminum oxide ceramic 

(AI2O3), stainless steel (AISI 316L)

luminum oxide ceramic 

(AI2O3), stainless steel (AISI 316L)

Internal volume

1/2'' tube

cm³ (in.³)

4.2 (0.26)

DN 16 ISO KF

cm³ (in.³)

4.2 (0.26)

DN 16 CF-R

cm³ (in.³)

4.2 (0.26)

8 VCR®

cm³ (in.³)

4.2 (0.26)






























































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