Compatible Vacuum Gauges And Controllers CDG025D 0.1~1000 Torr/mbar

Compatible Vacuum Gauges And Controllers CDG025D 0.1~1000 Torr/mbar

INTRODUCTION The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as...
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Product Details


INTRODUCTION


The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.


The INFICON  SKY  CDG025D Capacitance Diaphragm Gauges are direct replacements for the Oerlikon Leybold  CTR 100 transmitters.  Get the original from the manufacterer with global support and solutions for all applications.



BENEFITS


◆ Fully compatible with CTR 100 transmitters

◆ Full scale ranges from 100 mTorr … 1000 Torr

◆ Fast stability after power on

◆ Fast recovery from atmospheric pressure

◆ Corrosion resistant ceramic sensor

◆ Excellent long term signal stability

◆ Temperature compensated

◆ Sensor protected from contamination

◆ One pushbutton zero function

◆ Wide range power supply



TYPICAL APPLICATIONS


◆ Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD

◆ Data storage and display manufacturing equipment

◆ Industrial vacuum equipment

◆ General high accuracy pressure measurement



SPECIFICATION


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Type

1000 Torr 

/ 1100 mbar

500 ... 10 Torr / mbar1 Torr / mbar0.25 Torr

0.1 Torr

/ mbar

Accuracy% of reading0.20.20.20.250.5
Temperature effect
on zeropercent FS/°C0.0050.0050.0150.020.02
on span% of reading / °C0.01
0.010.010.030.03
Resolutionpercent FS0.0030.0030.0030.0030.003
Pressure, max.kPa (absolute)400260260130130

Response time 

ms303030130130
Lowest readingpercent FS0.010.010.010.010.01
Lowest suggested readingpercent FS0.050.050.050.050.05
Lowest suggested control pressurepercent FS0.50.50.50.50.5
Temperature

Operation 

(ambient)

°C+5 … +50+5 … +50+5 … +50+5 … +50+5 … +50
Bakeout at flange°C≤110≤110≤110≤110≤110
Storage°C–40 … +65–40 … +65–40 … +65–40 … +65–40 … +65
Supply voltageV (dc)+14 … +30+14 … +30+14 … +30+14 … +30+14 … +30

Power 

consumption

W≤1≤1≤1≤1≤1

Output signal 

(analog)

V (dc)0 … +100 … +100 … +100 … +100 … +10

Degree of 

protection


IP 30IP 30IP 30IP 30IP 30
Standards
CE conformity

EN 61000‑6‑2, EN 

61000-6-3, EN 61010 & RoHS

EN 61000‑6‑2, EN 

61000-6-3, EN 61010 & RoHS

EN 61000‑6‑2, EN 

61000-6-3, EN 61010 & RoHS

EN 61000‑6‑2, EN 

61000-6-3, EN 61010 & RoHS

EN 61000‑6‑2, EN 

61000-6-3, EN 61010 & RoHS

ETL certification

UL 61010‑1, CSA 22.2 No.

61010‑1

UL 61010‑1, CSA 22.2 No.

61010‑1

UL 61010‑1, CSA 22.2 No.

61010‑1

UL 61010‑1, CSA 22.2 No.

61010‑1

UL 61010‑1, CSA 22.2 No.

61010‑1

Electrical 

connection


D-sub, 15 pole, male

D-sub, 15 pole, male

D-sub,15 pole, male

D-sub,15 pole, male

D-sub,15 pole, male

Materials exposed to vacuum

Aluminum 

oxide ceramic (AI2O3), 

Vacon 70, 

stainless steel (AISI 316L ),

AgCuTi hard 

solder, sealing glass

Aluminum 

oxide ceramic (AI2O3), 

Vacon 70, 

stainless steel (AISI 316L ), 

AgCuTi hard 

solder, sealing glass

Aluminum 

oxide ceramic (AI2O3), 

Vacon 70, 

stainless steel (AISI 316L ), 

AgCuTi hard 

solder, sealing glass

Aluminum 

oxide ceramic (AI2O3), 

Vacon 70, 

stainless steel (AISI 316L ), 

AgCuTi hard 

solder, sealing glass

Aluminum 

oxide ceramic (AI2O3), 

Vacon 70, 

stainless steel (AISI 316L ), 

AgCuTi hard 

solder, sealing glass

Internal volume
1/2'' tubecm³ (in.³)3.6 (0.22)
DN 16 ISO KFcm³ (in.³)3.6 (0.22)
DN 16 CF-Rcm³ (in.³)3.6 (0.22)
8 VCR®cm³ (in.³)3.6 (0.22)












































































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