No. 3 diffusion pump oil is a kind of deep dewaxing lubricating oil which is processed by vacuum molecular distillation, aluminum silicate adsorption and membrane degassing process. No. 3 diffusion pump oil has extremely low saturation vapor pressure, proper chemical composition, ideal ultimate vacuum degree and high pumping speed. Its high thermal oxidation stability makes sure that it can work in harsh environment for a long time.
As working fluid of various types of glass and metal diffusion pumps, No. 3 diffusion pump oil is suitable for high vacuum distillation, vacuum smelting, electronics industry, atomic pump industry and other fields which requires high vacuum environment. It can also be used as the working fluid of direct connected vacuum pump.
Diffusion pump oil
kinematic viscosity 50℃mm2/s
kinematic viscosity 40℃mm2/s
Pour Point (℃)
Flash Point (℃)
Mechanical Impurity (%)
Acid Valuemg KOH/g
Ultimate pressure (Pa)
Saturated Vapor Pressure (Pa)
Carbon Residue (%)
Copper Corrosion Grade
● The saturated vapor pressure is extremely low at room temperature and the ultimate vacuum can reach 1×10-5kpa.
● Excellent thermal stability and high temperature resistance help avoid oxidation under the working temperature of 200℃ and the catalysis of metal.
● Good performance in terms of pumping rate and reflux rate.
● It can resist the radiation of the magnetic field, and also has fire resistant properties.
● High quality with no impurities or peculiar smell.