Spare Parts Of Sealing Elements For ZY-1713 Magnetron Sputtering Vacuum Coating Machine

Spare Parts Of Sealing Elements For ZY-1713 Magnetron Sputtering Vacuum Coating Machine

List of Spare Parts
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Product Details


List of Spare Parts


NO.ItemMaterialQtyPurpose
1Lip-type packing L5400
Vacuum rubber1
Cylinder
2O-ring φ 125x4FKM2Inspection window
3O-ring φ 105x4FKM4Inspection window
4Oil seal 8x22x7FKM4Inspection window
5O-ring φ 20x4FKM2Inspection window
6O-ring φ 2.5x2.5FKM2Thermometry
7O-ring φ 6x3NBR18Air inflation group
8O-ring φ 25x4FKM12Heater
9O-ring φ 100x4NBR20Cylindrical blind plate
10O-ring φ 815x6FKM4Target blind plate
11O-ring φ 200x4NBR1Bottom cover blind plate
12O-ring φ 120x3FKM10Arc source blind plate 1
13O-ring φ 18x3FKM10Arc source blind plate 2
14O-ring φ 42x4NBR6Grating valve blind plate
15O-ring φ 205x5FKM6Top cover flange 1
16O-ring φ 320x5FKM4Top cover flange 2
17O-ring φ 54x3FKM1Rotating stand
18O-ring φ 180x6FKM1Rotating stand
19O-ring φ 200x6FKM1Rotatinc
20O-ring φ 15x4NBR2Gauge
21O-ring φ 16x3Silicone9Cylindrical target
22Oil seal 25x42x7Silicone18Cylindrical target
23O-ring φ 90x5Silicone18Cylindrical target
24Oil seal 32x62x10Silicone27Cylindrical target
25O-ring φ 640x3NBR1Ion source
26O-ring φ 630x2.65NBR1Ion source
27O-ring φ 2x1.8NBR1Ion source
28O-ring φ 4x2.5NBR4Ion source
29O-ring φ 70x3.55NBR1Ion source
30O-ring φ 90x3.55NBR1Ion source
31O-ring φ 13x2NBR4Ion source
32O-ring φ 7x2.65NBR14Ion source
33Skeleton oil seal 10x22x7NBR10Arc source
34O-ring φ 18x3NBR10Arc source
35O-ring φ 105x5FKM5Arc source
36O-ring φ 108x5FKM5Arc source
37O-ring φ 815x6NBR2Arc source
38O-ring φ 65x4NBR3Unit
39
O-ring φ 160x5NBR2Unit


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