List of Spare Parts
| NO. | Item | Material | Qty | Purpose |
| 1 | Seal ring φ 2.5x2.5 | FKM | 2 | Thermometry |
| 2 | O-ring φ 15x4 | FKM | 4 | Gauge holder |
| 3 | O-ring φ 25x4 | FKM | 16 | Heater |
| 4 | Oil seal 15x35x10 | Rubber Ⅰ | 1 | Electric grating valve |
| 5 | O-ring φ 42x4 | NBR | 2 | Electric grating valve |
| 6 | Oil seal 10x22x7 | FKM | 4 | 180 Inspection window |
| 7 | O-ring φ 104x4 | FKM | 4 | 180 Inspection window |
| 8 | Skeletion oil seal 10x22x7 | NBR | 10 | Flange arc source |
| 9 | O-ring φ 18x3 | NBR | 10 | Flange arc source |
| 10 | O-ring φ 108x5 | FKM | 5 | Flange arc source |
| 11 | O-ring φ 112x5 | FKM | 5 | Flange arc source |
| 12 | Oil seal 40x62x10 | FKM | 3 | Main axis of rotating stand |
| 13 | O-ring φ 105x5 | FKM | 2 | Main axis of rotating stand |
| 14 | O-ring φ 880x10 | NBR | 1 | Trinity valve |
| 15 | O-ring φ 408x7 | NBR | 3 | Trinity valve |
| 16 | O-ring φ 64x4 | FKM | 3 | Trinity valve |
| 17 | O-ring φ 31x4 | FKM | 9 | Trinity valve |
| 18 | O-ring φ 450x8 | NBR | 3 | Trinity valve |
| 19 | O-ring φ 52x4 | NBR | 1 | 600 by-pass valve |
| 20 | O-ring φ 24x4 | NBR | 3 | 600 by-pass valve |
| 21 | O-ring φ 150x4 | NBR | 1 | 600 by-pass valve |
| 22 | O-ring φ 105x5 | NBR | 1 | 600 by-pass valve |
| 23 | O-ring φ 51x4 | NBR | 2 | 100 valve |
| 24 | O-ring φ 24x4 | NBR | 6 | 100 valve |
| 25 | O-ring φ 135x4 | NBR | 2 | 100 valve |
| 26 | O-ring φ 100x5 | NBR | 2 | 100 valve |
| 27 | O-ring φ 174x4 | NBR | 1 | 150 valve |
| 28 | O-ring φ 51x5 | NBR | 1 | 150 valve |
| 29 | O-ring φ 24x4 | NBR | 3 | 150 valve |
| 30 | O-ring φ 150x5 | NBR | 1 | 150 valve |
| 31 | Lip-type packing L4760 | Vacuum rubber | 1 | Cylinder |
| 32 | Seal ring φ 212x5 | NBR | 1 | Unit |
| 33 | Seal ring φ 150x4 | NBR | 1 | Unit |
| 34 | Seal ring φ 170x5 | NBR | 1 | Unit |
| 35 | Seal ring φ 85x4 | NBR | 3 | Unit |
| 36 | Seal ring φ 84x4 | NBR | 3 | Unit |
| 37 | Seal ring φ 104x4 | NBR | 3 | Unit |
| 38 | O-ring φ 12xL3180 | FKM | 1 | Arc source |
| 39 | O-ring φ 115x4 | NBR | 12 | 70 target bilnd plate |
| 40 | O-ring φ 35x3 | NBR | 2 | Arc source baffle blind plate |
| 41 | O-ring φ 130x4 | NBR | 1 | Central heater blind plate |
| 42 | O-ring φ 105x5 | NBR | 1 | Rotating blind plate |
| 43 | O-ring φ 45x3 | FKM | 2 | Grating valve holder blind plate |