List of Spare Parts
NO. | Item | Material | Qty | Purpose | Note |
1 | Lip-type packing L4400 | Vacuum rubber | 9 | Cylinder | Spare parts*2 |
2 | Seal ring φ 104x4 | FKM | 36 | Inspection window | Spare parts*2 |
3 | Oil seal 10x22x7 | NBR | 36 | Inspection window | Spare parts*2 |
4 | Seal ring φ 2.5x2.5 | FKM | 9 | Thermonetry | Spare parts*2 |
5 | O-ring φ 30x4 | NBR | 18 | Inflating module | Spare parts*2 |
6 | O-ring φ 6x3 | NBR | 18 | Inflating module | Spare parts*2 |
7 | O-ring φ 30x4 | FKM | 90 | Heater | Spare parts*2 |
8 | O-ring φ 85x4 | NBR | 9 | 80 exhaust port blind plate | Spare parts*2 |
9 | O-ring φ 273x6 | NBR | 18 | Pump limiter blind plate | Spare parts*2 |
10 | O-ring φ 33x4 | NBR | 108 | 30 blind plate | Spare parts*2 |
11 | O-ring φ 84x4 | NBR | 108 | 80 blind plate | Spare parts*2 |
12 | O-ring φ 105x5 | NBR | 9 | Swivel blind plate | Spare parts*2 |
13 | Sockets M8x20 | Stainless steel | 72 | Swivel blind plate | |
14 | O-ring φ 205x4 | FKM | 42 | Arc source blind plate | Spare parts*2 |
15 | Oil seal 40x62x10 | FKM | 27 | Swivel | Spare parts*2 |
16 | O-ring φ 105x5 | FKM | 18 | Swivel | Spare parts*2 |
17 | O-ring φ 85x4 | NBR | 1 | Unit | Spare parts*2 |
18 | Sockets M10x20 | Stainless steel | 4 | Unit | |
19 | O-ring φ 105x4 | NBR | 1 | Unit | Spare parts*2 |
20 | O-ring φ 84x4 | FKM | 2 | Planar gold target | Spare parts*2 |
21 | O-ring φ 62x4 | FKM | 2 | Planar gold target | Spare parts*2 |
22 | O-ring φ 33x4 | FKM | 1 | Planar gold target | Spare parts*2 |
23 | O-ring φ 11x2.5 | FKM | 1 | Planar gold target | Spare parts*2 |
24 | O-ring φ 9x3 | FKM | 1 | Planar gold target | Spare parts*2 |
25 | O-ring φ 10x3 | Silicone rubber | 1 | Arc source | Spare parts*2 |
26 | O-ring φ 128x5 | FKM | 1 | Arc source | Spare parts*2 |
27 | O-ring φ 195x5 | Silicone rubber | 2 | Arc source | Spare parts*2 |
28 | O-ring φ 4x2.5 | Silicone rubber | 2 | Arc source | Spare parts*2 |
29 | O-ring φ 75x5 | FKM | 1 | Arc source | |
30 | O-ring φ 20x4 | FKM | 1 | Arc source | |
31 | O-ring φ 18x3 | FKM | 2 | Arc source |