List of Spare Parts
| NO. | Item | Material | Qty | Purpose |
| 1 | Seal ring φ 2.5x2.5 | FKM | 2 | Thermometry |
| 2 | O ring φ 15x4 | FKM | 4 | Gauge holder set |
| 3 | O-ring φ 25x4 | FKM | 12 | Heater set |
| 4 | Oil seal 15x35x10 | Rubber Ⅰ | 1 | Electric grating valve |
| 5 | O-ring φ 42x4 | NBR | 2 | Electric grating valve |
| 6 | O-ring φ 105x4 | FKM | 3 | Inspection window set |
| 7 | O-ring φ 85x4 | FKM | 6 | Inspection window set |
| 8 | Oil seal 8x22x7 | FKM | 6 | Inspection window set |
| 9 | O-ring φ 20x4 | FKM | 3 | Inspection window set |
| 10 | O-ring φ 84x5 | FKM | 1 | Drive shaft |
| 11 | Oil seal 35x55x12 | FKM | 3 | Drive shaft |
| 12 | O-ring φ 90x5 | FKM | 1 | Drive shaft |
| 13 | O-ring φ 170x6 | NBR | 1 | Unit |
| 14 | O-ring φ 110x6 | NBR | 1 | Unit |
| 15 | O-ring φ 25x4 | FKM | 12 | Heater blind plate |
| 16 | O-ring φ 198x7 | FKM | 12 | Arc source blind plate |
| 17 | O-ring φ 200x8 | FKM | 1 | Cathode blind plate |
| 18 | O-ring φ 95x4 | FKM | 1 | Anode blind plate |
| 19 | O-ring φ 90x5 | FKM | 1 | Swivel holder blind plate |
| 20 | O-ring φ 45x3.2 | FKM | 2 | Grating valve blind plate |
| 21 | O-ring φ 285x6 | FKM | 3 | Trinity valve |
| 22 | O-ring φ 245x5 | FKM | 3 | Trinity valve |
| 23 | O-ring φ 64x4 | FKM | 3 | Trinity valve |
| 24 | O-ring φ 24x4 | FKM | 9 | Trinity valve |
| 25 | O-ring φ 570x10 | FKM | 1 | Trinity valve |
| 26 | O-ring φ 68x5 | FKM | 1 | 300 By-pass valve |
| 27 | O-ring φ 95x4 | FKM | 1 | 300 By-pass valve |
| 28 | O-ring φ 24x4 | FKM | 3 | 300 By-pass valve |
| 29 | O-ring φ 52x4 | FKM | 1 | 300 By-pass valve |
| 30 | O-ring φ 51x4 | FKM | 2 | 100 Valve |
| 31 | O-ring φ 24x4 | FKM | 6 | 100 Valve |
| 32 | O-ring φ 100x5 | FKM | 2 | 100 Valve |
| 33 | Lip-type packing L4310 | Vacuum rubber | 1 | Cylinder |
| 34 | O-ring φ 105x4 | FKM | 12 | Inspection window set |
35 | O-ring φ 85x4 | FKM | 24 | Inspection window set |
| 36 | Ground glass φ 78x4 | Glass | 12 | Inspection window set |
| 37 | Oil seal 8x22x7 | FKM | 24 | Inspection window set |
| 38 | O-ring φ 20x4 | FKM | 12 | Inspection window set |