List of Spare Parts
| NO | Item | Material | Qty | Purpose | Note | |
| 1 | O-ring φ 2.5x2.5 | FKM | 2 | Cylinder | Thermometry | Spare parts*2 |
| 2 | Lip-type packing L3450 | Vacuum rubber | 1 | Cylinder | Slide door seal | Spare parts*2 |
| 3 | O-ring φ 15x4 | FKM | 7 | Cylinder | Vacuum gauge holder | Spare parts*2 |
| 4 | O-ring φ 25x4 | FKM | 8 | Cylinder | Heater | Spare parts*2 |
| 5 | O-ring φ 125x4 | FKM | 1 | Door | Inspection window | Spare parts*2 |
| 6 | O-ring φ 105x4 | FKM | 2 | Door | Inspection window | Spare parts*2 |
| 7 | Oil seal 8x22x7 | FKM | 2 | Door | Inspection window | Spare parts*2 |
| 8 | O-ring φ 20x4 | FKM | 1 | Door | Inspection window | Spare parts*2 |
| 9 | O-ring φ 285x6 | FKM | 3 | Trinity valve | Spare parts*2 | |
| 10 | O-ring φ 62x5 | FKM | 3 | Trinity valve | Spare parts*2 | |
| 11 | O-ring φ 24x4 | FKM | 9 | Trinity valve | Spare parts*2 | |
| 12 | O-ring φ 245x5 | FKM | 3 | Trinity valve | Spare parts*2 | |
| 13 | O-ring φ 570x8 | FKM | 1 | Trinity valve | Spare parts*2 | |
| 14 | O-ring φ 285x10 | NBR | 1 | Unit | Spare parts*2 | |
| 15 | O-ring φ 170x5 | NBR | 1 | Unit | Spare parts*2 | |
| 16 | O-ring φ 108x5 | NBR | 1 | Unit | Spare parts*2 | |
| 17 | O-ring φ 85x4 | NBR | 4 | Unit | Spare parts*2 | |
| 18 | O-ring φ 104x4 | NBR | 2 | Unit | Spare parts*2 | |
| 19 | O-ring φ 84x5 | FKM | 1 | Drive shaft | Spare parts*2 | |
| 20 | Oil seal 35x55x12 | FKM | 3 | Drive shaft | Spare parts*2 | |
| 21 | O-ring φ 90x5 | FKM | 1 | Drive shaft | Spare parts*2 | |
| 22 | O-ring φ 22x4 | 1 | Bias voltage | Spare parts*2 | ||
| 23 | O-ring φ 30x3.6 | 1 | Bias voltage | Spare parts*2 | ||
| 24 | Oil seal 15x35x10 | Rubber Ⅰ | 2 | Electric grating valve | Spare parts*2 | |
| 25 | O-ring φ 42x4 | NBR | 2 | Electric grating valve | Spare parts*2 | |
| 26 | O-ring φ 25x4 | NBR | 4 | Blind plate | Heater blind plate | Spare parts*2 |
| 27 | O-ring φ 45x3 | NBR | 2 | Blind plate | Grating valve blind plate | Spare parts*2 |
| 28 | O-ring φ 200x8 | NBR | 12 | Blind plate | Arc source blind plate | Spare parts*2 |
| 29 | O-ring φ 222x6.5 | NBR | 1 | Blind plate | Cathode holder blind plate | Spare parts*2 |
| 30 | O-ring φ 95x4 | NBR | 1 | Blind plate | Cathode holder blind plate | Spare parts*2 |
| 31 | O-ring φ 33x3 | NBR | 1 | Blind plate | Bias blind plate | Spare parts*2 |
| 32 | O-ring φ 90x5 | NBR | 1 | Blind plate | Swivel blind plate | Spare parts*2 |