Spare Parts Of Sealing Elements For ZY-0805 Hollow Cathode Multi-Arc Coating Machine

Spare Parts Of Sealing Elements For ZY-0805 Hollow Cathode Multi-Arc Coating Machine

List of Spare Parts
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Product Details


List of Spare Parts


NO.Item
Material
Qty
Purpose
1O-ring φ 830x10FKM
1
Cylinder (upper flange)
2O-ring φ 90x3NBR
1Cylinder (upper cover plate)
3O-ring φ 85x4FKM2Cylinder (upper cover plate)
4O-ring φ 14x3NBR3Cylinder (exhaust port)
5O-ring φ 24x3NBR1Cylinder (exhaust port)
6O-ring φ 84x4FKM6Cylinder (inspection window)
7Convex-ring φ 408x8x8Vacuum Oil resistant rubber1GDQ-400 valve
8O-ring φ 64x4FKM1GDQ-400 valve
9O-ring φ 31x4FKM3GDQ-400 valve
10O-ring φ 458x8NBR1GDQ-400 valve
11O-ring φ 80x4NBR2Molecular pump unit
12O-ring φ 70x4NBR1Molecular pump unit 
13O-ring φ 104x4NBR4Molecular pump unit
14O-ring φ 108x4NBR3Molecular pump unit
15O-ring φ 85x4NBR1Molecular pump unit
16O-ring φ 481x8NBR1Molecular pump unit
17Skeleton & O-ring 
2




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