What Role Does The Chiller Play In The Vacuum Coating Process?

- Apr 17, 2019-

What role does the chiller play in the vacuum coating process?


The working principle of vacuum coating is that the film body evaporates and falls on the workpiece surface to crystallize at high temperature.As the air on the evaporation of membrane molecules will produce resistance caused by the collision of crystals become rough matte, so must be in a high vacuum to make the crystal fine and bright, if the vacuum is not high crystal will lose luster and poor binding force. Early vacuum coating is dependent on evaporation of natural scattering, combined with poor efficiency low gloss. Now, in addition to the medium frequency magnetron sputtering target, the evaporating molecules of the film body are accelerated to bombast the target material under the action of electric field with the magnetron target, and a large number of target atoms are sputtered out, and the neutral target atoms (or molecules) are deposited on the substrate to form a film, which solves the problem of the film body variety that cannot be processed by natural evaporation in the past, such as titanium and zirconium plating and so on.


If equipment must add cooling water, because of its high frequency current. When the current flows in the conductor, there is a skin effect, and the charge will accumulate in the surface area of the conductance, so that the conductance is heated. Therefore, the middle hole tube is used as the conductor and water is added to cool it.


Why water cooling? Magnetron sputtering targets produce high temperatures during launch that deform the gun, so it has a jacket to cool the gun. At the same time, there is another important reason that magnetron sputtering can be considered as one of the outstanding achievements of z* in coating technology. It has high sputtering rate, low substrate temperature rise and good film - base adhesion.


The general principle of magnetron sputtering and the transverse non-uniformity and symmetry of magnetic field are discussed. Magnetron sputtering can be considered as one of the outstanding achievements of z* in coating technology. It is characterized by high sputtering rate, low substrate temperature rise, good film - base adhesion and stable device performance.


Chiller is a kind of water cooling equipment, can provide constant temperature, constant current, constant pressure cooling water equipment.Its working principle is to inject a certain amount of water into the water tank of the machine first, cool the water through the refrigeration system, and then send the low-temperature cooling water into the cooling equipment by the water pump, the temperature rises after the cooling water takes away the heat and then flows back to the water tank to achieve the cooling effect. Cooling water temperature can be automatically adjusted according to requirements, long-term use can save water.



The chiller can control the temperature of the vacuum coating machine to ensure the high quality of the plating parts. If it is not suitable for the chiller, the vacuum coating machine cannot achieve the purpose of high-precision and high-efficiency temperature control, because natural water and water tower heat dissipation are inevitably affected by the natural temperature, and this way of control is very unstable.


Cold water machine has completely independent refrigeration system, not influenced by temperature and environmental, the water temperature in 5 ~ 30 range adjusting control, thus achieve the purpose of temperature control and high precision, high efficiency, cold water machine is equipped with independent water recycling system.


IKS PVDMFmedium frequencymegnetron sputtering coating machinecontactiks.pvd@foxmail.com