Vacuum coating equipment is the most widely used equipment to make vacuum conditions. It is widely used. Today, our life can not be separated from it. Today we will see its structure and working principle.
1. Vacuum main body vacuum cavity
According to the requirements of different products, chambers of different sizes, now with a maximum diameter of 1.3M, application of 0.9M, 1.5M, 1.8M etc., the chamber is composed of stainless steel, not rust, solid, each portion of the vacuum chamber is connected with the valve, used to connect the suction pump.
2. Film forming control system
There are many application methods of thin film monitor in vacuum coating machine, such as visual monitoring method, fixed value monitoring, crystal oscillation monitoring, time monitoring and so on.
3. Auxiliary pumping system
The exhaust system uses the "diffusion pump + mechanical pump + roots pump + cryogenic cold trap + polycold" composition.
4. Evaporation system
Evaporation system mainly refers to the film forming device, and the coating machine has many film forming devices, such as resistance heating, electron gun evaporation, magnetron sputtering, RF sputtering, ion plating and other ways.
A complete vacuum coating machine is composed of a number of systems, each system can perform different functions, it is these structures, the final realization of high-quality coating.