Vacuum Coating Machine Details

- Mar 23, 2019-

Vacuum coating machine details


System overview

Vacuum coating machine mainly refers to a kind of coating which needs to be carried out at a high vacuum degree, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and so on. The main idea is divided into evaporation and sputtering.


It is often used for nanometer surface treatment in semiconductor, photovoltaic, electronics, precision optics and other 


System principle

The target material to be plated in the crucible is bombarded with electrons by the electron gun under high pressure, which is vaporized and deposited on the substrate under high vacuum to obtain the coating film.

The system configuration

* automatic controller: e-control PLC is the core hardware platform of the Control system.

* human-machine interface hardware: industrial TPC1503 15-inch touch tablet computer, stable and reliable.

* human-machine interface software: NETSCADA configuration software development platform, providing control and monitoring of vacuum coating machine.


System evaluation:

* up to 99 layers per film forming support;

* automatic reverse reverse, double side coating can be achieved;

* support Excle to import target materials, equipment parameters, process parameters, etc.;

* support custom control of the number of pixel points of the electron gun to achieve seamless heating control of the target;

* for different heating sections, different evaporation modes are adopted to ensure both the uniform temperature of molten material and the efficiency of molten material;

* one-click start, from start to the end of production only need to click the mouse, all kinds of production processes automatically complete;

* batch number data management scheme, real-time automatic storage of production information, production data available;

* networking solution, providing remote networking port, easily realizing remote multi-system centralized control and management;


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