Maintenance skills of vacuum coating equipment
At present, many manufacturers are not very clear about the maintenance of vacuum coating equipment. When it is necessary to carry out maintenance, the result is out of the question, which makes many manufacturers with vacuum coating equipment very headache. Today we'd like to share with you three tips on how to repair and maintain the vacuum coating equipment.
1. The workshop should be cleaned once the vacuum coating equipment completes more than 200 coating procedures.
Method: repeatedly scrub the vacuum chamber wall with NaOH saturated solution (note that human skin can not directly contact caustic solution to avoid burns). The purpose is to make the coated aluminum (AL) react with NaOH, and the membrane layer falls off after the reaction, and release hydrogen gas. Clean the vacuum chamber with clean water and clean the dirt in the pump valve with cloth.
2. When the crude pump (slide valve pump, rotary vane pump) works continuously for one month (the rainy season is halved), new oil shall be replaced.
Method: unscrew the oil bolt, remove the old oil, and start the pump for a few seconds, so that the old oil in the pump is fully discharged. Screw back the oil bolt, add the new oil to the amount of oil (oil visual observation). Continue to use more than half a year, oil cover should be opened when changing oil, clean the box with cloth dirt.
3. The diffusion pump has been used continuously for more than 6 months, and the pumping speed is significantly slower.
Diffusion pump use more than six months in a row, pumping speed significantly slower, or improper operation, filling the air and down link pipes, electric plate, will be squeezed out of the primary nozzle, use gasoline pump cavity and pump bravery to clean first, clean with detergent water again, and then clean with clear water thoroughly clean, moisture volatilizes dry after installed pump, add new oil diffusion pump, and put back into the body, connected pipes, installed electric stove disk, can restart. Pay attention to leak detection before starting up again.
Method: start the maintenance pump and close the door. After several minutes, observe whether the vacuum of the diffusion pump reaches 6X10 pa. Otherwise, leak detection should be carried out. Check if the joint is sealed with rubber ring, or crush the sealing ring. Remove the risk of air leakage before heating, otherwise the diffusion pump oil will burn the ring, unable to enter the working state.