Knowledge of Vacuum coating equipment, save it for fresh man
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1. What is vacuum coating equipment?
Vacuum coating equipment mainly refers to a kind of coating that needs to be carried out at a high vacuum degree, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and so on. The main idea is divided into evaporation and sputtering.
What needs to be coated is called a substrate, and the coated material is called a target material. The substrate is in the vacuum chamber with the target material.
Evaporation coating is generally heating the target material so that the surface components in the form of atomic groups or ions are evaporated, and deposition on the surface of the substrate, through the film forming process (scatter - island structure - vagal structure - layer growth) to form a film. For sputtering coating, it can be simply understood as bombarding the target material with electrons or high-energy laser, and making the surface components sputtering out in the form of atomic groups or ions, and finally depositing on the substrate surface, experiencing film-forming over-evaporation coating equipment + coating product diagram evaporation coating equipment + coating product diagram, and finally forming a film.
2. Vacuum coating equipment using steps
(1) Operation of electric control cabinet
1) Open water pump and gas source
2) Open the total power supply
3) Open the maintain pump, vacuum gauge power supply, vacuum gauge file position V1, and wait for its value less than 10 before entering the next operation. It takes about five minutes.
4) Turn on the mechanical pump, prepump, turn on the power supply of the molecular pump of the turbine, and start. Switch the vacuum gauge to V2 position and pump until less than 2, about 20 minutes.
5) After the reading of the turbine molecular pump reaches 250, close the pump, open the front machine and the high valve and continue to pump vacuum. Only after the vacuum reaches a certain level can the high vacuum gauge head on the right be opened to observe the vacuum degree. The vacuum reaches 2 x 10-3 before the gun power can be turned on.
(2)Operation of DEF-6B electron gun power cabinet
1) Turn on the main power
2)Turn on the gun control Ⅰand the gun control Ⅱ power at the same time, according to the electron gun control Ⅰ power supply, delay switch, delay, power and to protect the light, three minutes after the time delay and protect the lights went out, if the back door is not closed or malfunction with the current relay, protect will normally on.
3) Open the high voltage, the high voltage will reach more than 10KV, adjust the beam flow to about 200mA, the curtain grid is 20V/100mA, filament current 1.2a, deflection current swing between 1 and 1.7.
(3). The order of Turn it off
1) Close the high vacuum gauge head, close the molecular pump.
2) When the molecular pump is displayed to 50, close the high valve, front stage and mechanical pump successively, which takes about 40 minutes.
3) When below 50, turn off the maintenance pump.
3. Application scope of Vacuum coating equipment
(1) Building hardware: bathroom hardware (such as water tap), door lock, door handle, bathroom, door lock, hardware leaves, furniture, etc.
(2) Watchmaking industry: can be used for watchcase, watchband coating, crystal products.
(3) Other hardware: leather hardware, stainless steel tableware, spectacle frames, knives, molds, etc.
(4) Large workpiece: automobile wheel hub, stainless steel plate, signboard, sculpture, etc.
(5) Stainless steel tubes and plates (various types of surfaces)
(6) Furniture, lamps, hotel utensils
(7) Lock, handle, bathroom hardware, golf head, stainless steel tableware, blood and other hardware products plated with super hard decorative film.
(8) Glasses, jewelry and other accessories are plated with ultra-wear-resistant decoration (gold and silver) nano-film and nano-film and nano-laminated film.
4. Methods of care and maintenance methods
(1) Vacuum coating equipment should clean the studio once every 200 or more coating procedures are completed.
The method is as follows: repeatedly scrub the vacuum wall with NaOH saturated solution, (note that human skin cannot directly contact the alkali solution, so as not to burn) the purpose is to make the coated film material aluminum (AL) react with NaOH, after the reaction, the film layer falls off, and release hydrogen. Clean the vacuum chamber with clean water and clean the dirt inside the fine extraction valve with cloth dipped in gasoline.
(2) When the rough pump (slide valve pump, rotary vane pump) continuous work for a month (the rainy season in half), need to replace the new oil.
The method is: screw open oil bolts, put off the old oil, and then start the pump for a few seconds, so that the old oil in the pump completely discharged. Screw the rewind oil bolt and add the new oil to the amount (observed by oil mirror). Continuous use for more than half a year, the oil cap should be opened when changing the oil, with a cloth to wipe off the dirt inside the box.
(3) Diffusion pump use more than six months in a row, pumping speed significantly slower, or improper operation, filling the air and down link pipes, electric plate, will be squeezed out of the primary nozzle, use gasoline pump cavity and pump bravery to clean first, clean with detergent water again, and then clean with clear water thoroughly clean, moisture volatilizes dry after installed pump, add new oil diffusion pump, and put back into the body, connected pipes, installed electric stove disk, can restart. Pay attention to leak detection before restarting the machine. The method is: start the maintenance pump, close the door, a few minutes later, observe the diffusion pump part of the vacuum is up to 6X10 Pa, or to leak detection. Check whether the joint is fitted with sealing ring, or the sealing ring is crushed. Remove the potential gas leakage before heating, otherwise the diffusion pump oil will burn the ring, can not enter the working state.