Factors affecting the results of magnetron sputtering coating
1, the influence of sputtering power, in the case of substrate and coating materials are determined, the selection of process parameters have a great impact on the growth rate and quality of the coating. Among them, the setting of sputtering power has a great influence on both aspects.
2. The influence of air pressure: magnetron sputtering is carried out at a high speed under low pressure, so it is necessary to improve the ionization rate of gas and make the gas form plasma. Under the condition that sputtering power is fixed, the influence of air pressure on magnetron sputtering is analyzed.
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