Electronic device coating is mainly used for film resistance and capacitance. Thin film resistor can provide 10 ~ 1000 m Ω resistance, and small temperature coefficient of resistance, good stability, can effectively reduce the size of the device. The target materials for thin film resistance include NiCr target, NiCrSi target, CrSi target, Ta target and NiCrAl target, etc.
IKS PVD vacuum coating machine,sputtering target material,for you to refer.
