Brief Introduction Of PVD Coating Sputtering System And Control System

- Feb 10, 2018-

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Sputtering System

Sputtering system is the core of PVD coating, which consists of targets, target power supply and special gas. There are many kinds of target power supply and they come in several varieties as below:

1. According to the output mode, there are DC power supply, AC power supply (sine wave, square wave), pulse power supply and DC superimposed pulse power supply;

2. According to the output frequency, there are DC power supply, low frequency power supply and medium frequency power supply;

3. According to the power, there are low-power supply, medium-power supply, high-power supply and super-power supply;

4. According to the control mode, there are constant current power supply, constant voltage power supply and constant power supply.

Control System

Control system is the soul of the whole device, it control the operation of entire system. Control system consists of software operating system, data acquisition system, data analysis system and executive transmission system and so on. Among them, the data collection system collects, flow (steam), vacuum pressure, motor speed, valve position and other information. Besides, Software operating system and data analysis system are PLC under most circumstances. Moreover, the executive transmission system consists of various relays, contactors, solenoid valves, switches, etc.