Why is the fine pumping of vacuum coating machine too slow?

- Mar 20, 2019-

Why is the fine pumping of vacuum coating machine too slow?

 

Vacuum coating machine fine pumping is too slow mainly from the following aspects to find the reasons:

 

first, the diffusion pump may not be great. Solution: can be used to ionization gauge single connected to the diffusion pump pumping hole, to see how much the diffusion pump single pumping can reach, to see the pumping time and limit, and then compare.

 

Second, The vacuum system has slight leakage. Solution: this requires a slow leak detection to see if the vacuum holding time is up to par.

 

 Third, the box is too dirty,the amount of air released is large. Solution: cleaning box

 

fourth, not before the mechanical pump or mechanical pump garrotz pump vacuum is not good. Solution: the front stage pipe can be tested separately with a resistance gauge.