The role of water cooler in vacuum coating process

- Nov 10, 2018-

The role of water cooler in vacuum coating process


The working principle of vacuum coating is that the membrane evaporates at high temperature and falls on the surface of the workpiece. As the air resists the vaporization of the membrane molecules, resulting in a collision that makes the crystals rougher and duller, it must be under a high vacuum to make the crystals as shiny as possible. The early vacuum coating relies on the natural scattering of evaporator, combined with low efficiency and low gloss.Now, with the addition of medium frequency magnetron sputtering target, the evaporation molecules of the membrane were accelerated to bombard the target under the action of electric field. A large number of target atoms were sputtered, and a neutral target atom (or molecule) was deposited on the substrate to form a film.


Medium frequency equipment must be equipped with cooling water because of its high frequency and high current. When the current flows through the conductor, there is a skin effect. The charge will accumulate in the surface area of the conductance, which makes the conductance hot. Therefore, medium hole tube is used as the conductor and water is added to cool the conductor.


(mainly cylindrical targets) why water cooling?


The high temperature of the magnetron sputtering target during firing deforms the gun, so it has a water jacket to cool the gun. There is also an important reason why magnetron sputtering can be considered as one of the most outstanding achievements in coating technology. It has high sputtering rate, low substrate temperature rise and good film-base bonding.


The more general principle of magnetron sputtering and the transverse inhomogeneity and symmetry of magnetic field are the essential reasons of magnetic constraint. Magnetron sputtering can be regarded as one of the most outstanding achievements in coating technology. It has high sputtering rate, low substrate temperature rise, good film-base binding force and stable device performance.


The chiller is a kind of water cooling equipment, which can provide constant temperature, constant current and constant pressure. Its working principle is to inject a certain amount of water into the water tank in the machine first, cool the water through the refrigeration system, and then send the low-temperature cooling water into the equipment to be cooled by the pump. The chilled water will take away the heat and then increase the temperature and return to the water tank, so as to achieve cooling effect. The cooling water temperature can be adjusted automatically according to the requirement.


The cold water function controls the temperature of the vacuum coating machine to ensure the high quality of the plating. If it is not equipped with a cold water machine, the vacuum coating machine can not achieve the purpose of high accuracy and high efficiency, because natural water and tower heat dissipation are inevitably affected by the natural temperature, and this way of control is unstable.


Cold water machine has completely independent refrigeration system, not influenced by temperature and environmental, the water temperature in 5 ~ 30 range adjusting control, thus achieve the purpose of temperature control and high precision, high efficiency, cold water machine is equipped with independent water recycling system.

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