The composition of electron beam evaporation coating machine

- May 02, 2020-

The composition of electron beam evaporation coating machine

The electron beam evaporation coating machine mainly consists of control system, true air path system and electron gun system. 1. There are two pumps in the vacuum air path of the true air path of the electron beam evaporation coating machine, namely the front stage mechanical pump and the high vacuum cryogenic pump, among which the cryogenic pump function is mainly through the very low temperature, according to the original adsorption of the cold umbrella to achieve the purpose of vacuum. In the process of high vacuum pump start-up at low temperature, level of mechanical pump will be before the pipeline in a vacuum state, when the vacuum pipeline reaches a certain extent, auspicious valve will open, this level before the mechanical pump will continue to work, make the pipe and low temperature pump has a vacuum state, then, was a former stage valve is repeating the above steps. 2. Electron beam heating and evaporation source the evaporation source of electron beam is mainly composed of electron gun and crucible. If necessary, a set of mechanical equipment that can provide raw materials for the coating machine may be attached. In most cases, the control device that produces and controls the electron beam and the design of the crucible will be integrated in the coating machine. The following are several structures of the electron beam heating and evaporation sources. The evaporator heated by linear cathode and electrostatic focusing. (2) the evaporator heated by annular cathode and electrostatic focusing. The evaporator heated by axial gun and electrostatic remote focusing. The evaporator heated by axial gun, magnetic focusing and magnetic deflection 90 degrees. E - type gun evaporator, E - type electron beam evaporation source emitted by the electron trajectory is similar to the "E" word, so it is referred to as E gun. At present, this form of evaporation source is most widely used in vacuum evaporation and coating process.

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IKS-OPT2700 optical E-gun vacuum coating machinemore details,contact: iks.pvd@foxmail.com