There are various kinds of vacuum application equipment, but no matter what kind of vacuum application equipment has a set of vacuum pumping system to obtain the required vacuum conditions in the vacuum container.
For example: a vacuum processing container, which is connected to the vacuum pump by pipelines and valves. When the vacuum pump evacuates the container, a vacuum measurement device is required on it. This constitutes the simplest vacuum pumping system. (Figure.1)
The simplest vacuum system shown in Fig. 1 can only achieve a vacuum in a low vacuum range within a pumped vessel. When a vacuum in a high vacuum range needs to be obtained, it is usually connected a high vacuum pump in series in the vacuum system shown in Fig. 1. When a high vacuum pump is connected in series, valves are usually installed at the inlet and outlet of the high vacuum pump respectively, so that the high vacuum pump can maintain vacuum alone. If the high vacuum pump connected in series is an oil diffusion pump, a trap (water-cooled baffle) is usually installed at the inlet of the oil diffusion pump to prevent a large amount of oil vapor from flowing back into the pumped container (as shown in Figure 2). According to the requirements, dust collector, vacuum relay gauge head, vacuum soft connecting pipe, vacuum pump inlet purge valve and other parts can also be installed to the pipeline, thus constituting a relatively complete high vacuum system.
Where a vacuum system consists of more than two vacuum pumps connected in series, the pump for the low vacuum is usually called the backing pump (or forepump) of the upper high vacuum pump, and the highest level vacuum pump is called the main pump of the vacuum system, that is, it is the most important pump. The ultimate vacuum and working vacuum in the pumped vessel are determined by the main pump. The piping between the outlet of the pumped container and the inlet of the main pump is called a high-vacuum line. The valve at the inlet of the main pump is called the main valve.
Usually the backing pump doubles as a pre-pump. The pipe from the pumped vessel to the pre-pump is called the pre-vacuum line. The valve on this line is called the pre-vacuum line valve. The line between the main pump outlet and the foreline pump inlet is called the foreline. The valve on this line is called the foreline valve, and the soft connection line is set up to isolate the vibration of the foreline pump.
In general, a complete vacuum system consists of the following components:
1. Pumping equipment: for example, a variety of vacuum pumps.
2. Vacuum valve
3. Connecting pipeline
4. Vacuum measuring devices: such as vacuum pressure gauges and various regulatory.
5. Other components: such as traps, dust collectors, vacuum relay gauges, gas tanks, etc.
So, what exactly is a vacuum system? Summarized in one sentence is: an exhaust system that is used to obtain a specific degree of vacuum.
The basic content of the vacuum system design is choosing the appropriate vacuum system design scheme according to the requirements of the vacuum degree of the pumped container, and perform the selection and pump calculation to determine the catheter, valve, trap, vacuum measurement components, etc., and ensure reasonable allocation. Finally, the vacuum system assembly drawings and parts drawings are drawn.