Several power sources in PVD technology-Magnetron sputtering power supply

- Aug 22, 2020-

Several power sources in PVD technology-Magnetron sputtering power supply

 

Magnetron sputtering technology developed by leaps and leaps in the 1970s, mainly experiencing several milestone stages such as balanced magnetron sputtering, non-balanced magnetron sputtering, reactive sputtering and co-sputtering, pulsed magnetron sputtering. According to the type of power source used by magnetron sputtering, magnetron sputtering technology can be divided into DC magnetron sputtering, intermediate frequency magnetron sputtering, rf magnetron sputtering and pulse magnetron sputtering.

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