Several power sources in PVD technology-Bias voltage power supply
The bias power supply is an important component of vacuum physical vapor deposition equipment. In vacuum ion deposition, the bias power supply plays a key role in the film formation quality. Bias voltage refers to the negative voltage applied on the substrate during the coating process. The positive pole of the bias power supply is connected to the vacuum chamber, while the vacuum chamber is grounded, and the negative pole of the bias is connected to the workpiece. Because the voltage of the ground is generally considered to be zero potential, the voltage on the workpiece is said to be negative bias. Bias can improve the energy of vacuum plasma electrically charged particles in the body, the bombardment cleaning the plated surface, make the surface through new surface after high-energy particle collisions, so as to improve the adhesion strength of the deposited film layer, zapped by bias, between film and substrate to generate a compatible with both the transition metal layers, so that the film layer and substrate, and can rely on different ways of voltage output polarity or change the sedimentary rules, adjust the coating color and performance. In addition, the substrate is heated by bombardment with charged ions. According to the waveform, it can be divided into:Dc pulse bias，Dc superposition pulse bias，Bipolar pulse bias.
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