Selection of vacuum measuring equipment in different vacuum ranges

- Feb 21, 2020-

Selection of vacuum measuring equipment in different vacuum ranges

vacuum range

Vacuum measuring equipment

others

Rough vacuum

General vacuum applications, spring type vacuum gauge (mechanical elastic deformation gauge)

At the same time, when measuring from rough vacuum to low vacuum, diaphragm type vacuum meter, capacitive film type vacuum meter and radioactive ionization vacuum meter can be used

101325-1000Pa

Corrosive gas, capacitive film gauge

Precision measuring occasions, u-type vacuum gauge

Low vacuum

For rough indication onlySpark vacuum indicator

1000-0.1Pa

In general, thermocouple or resistance vacuum gauge

Precision measurement, compression type vacuum gauge or capacitance type thin film vacuum gauge

high vacuum

The main use of ionization vacuum gauge


10-1-10-6Pa

Compression vacuum gauge

At the same time, it is required to measure low vacuum and high vacuum, compound vacuum gauge (combination of ionization vacuum gauge and thermocouple vacuum gauge) or high pressure ionization vacuum gauge

Cold cathode ionization vacuum gauge for vacuum equipment with large discharge capacity and occasions with low requirements

 ultrahigh vacuum (UHV)

B-A Type ionization vacuum gauge

From low vacuum measurement to ultra high vacuum, wide range ultra high vacuum meter or composite ultra high vacuum meter

10-6-10-10Pa

Cold cathode magnetically controlled ionization vacuum gauge

very high vacuum(XHV)

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Cold cathode magnetically controlled ionization vacuum gauge


Under 10-10Pa

Hot-cathode magnetically controlled ionization vacuum gauge


Improved b-a ionization vacuum gauge


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