Pulsed magnetron sputtering power supply

- Aug 25, 2020-

Pulsed magnetron sputtering power supply adopts rectangular wave voltage, which can effectively suppress the generation of arc and eliminate the film defects caused by it, and at the same time can improve the deposition rate and reduce the deposition temperature and a series of significant advantages, making it a preferred power source for the deposition of sputtering insulation materials.
There are two stages of positive voltage and negative voltage in one cycle. In the negative voltage section, the power supply works on the sputtering of the target material, and the positive voltage section is introduced

ZY-1011 PVD vacuum coating machine

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