Measurement Of Vacuum Degree Of Known Mixed Gas Compositions

- Jul 12, 2018-


When testing the vacuum system of a mixed gas with a heat conduction vacuum gauge, if the volume percentage Vi (i = 1, 2, 3, ..., n) of various gases in the mixed gas is known, the relative sensitivity S of mixed gas for the air can be calculated by the following formula.

 

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Where: Vi—the volume percentage of the i-th gas;


Sri—the relative sensitivity of the i-th gas.

 

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After calculating Sr, the result measured by the above method is multiplied by Sr to obtain the actual vacuum of the mixed gas.