Maintenance skill of electron beam evaporator coating machine
In the process of using the electronic evaporation beam coating machine because of the characteristics of their own equipment may appear or large or small fault problems, the most common fault is mostly by the circuit short circuit, coating material residue and other reasons. 1, vacuum chamber with anxious burnt flavour equipment in use, from the vacuum chamber, anxious burnt flavour is preferred to judge when parts are damaged or destroyed, if found after considering the parts without any abnormal or damaged, the staff will need to gradually screening equipment, in the process of maintenance need to test the cavity adopts the method of excluding, electron evaporation source is the main structure of the whole system, is also the most need to detect the location of the screening problem. 2, the electron gun can not work normally because the electron beam is generated by the electron gun, if the electron gun can not work normally, the normal work of the entire device will be affected. The first thing to be determined is whether the connection of the high-voltage cable is normal. If the situation is normal, it is necessary to check whether the surrounding environment is relatively wet. The wet environment may cause the circuit short circuit, which is easy to cause equipment failure. 3 electron beam cannot normal load, appear this kind of fault may be electrode or electrode or the internal voltage regulator for carbon deposit or short circuit phenomenon, it is normal in low current, but the current up to a certain value when the breakdown, jump will appear the phenomenon of circuit breaker, sometimes found on the surface, it is best to megger over the ground shake.
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