The maintenance and repair knowledge of diffusion pump for PVD vacuum coating machine

- Oct 18, 2018-

The maintenance and repair knowledge of diffusion pump for PVD vacuum coating machine


The main parts of the vacuum coater can operate in the best condition, that is very important to maintenance and repair the diffusion pump of vacuum coating machine.


1. The cooling water must be unblocked during the operation of the diffusion pump, and the cooling water can be closed after the pump's working fluid has been completely cooled after the heating is stopped.

2. When the diffusion pump stops working, the pump should be kept in a vacuum to avoid deterioration of oil.

3. The pumped gas shall be dry, corrosion-free and dust-free.

4. If the diffusion pump is not used for the time being, it shall be kept in a vacuum state during storage to avoid oil pollution from the pump and corrosion of each part and to blow the remaining water into the cooling water. Keep the room temperature between 10 and 40 degrees Celsius.

5. The performance of the diffusion pump will deteriorate gradually after long-term operation and should be checked regularly. If the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; The parts and pump Chambers are cleaned with aviation gasoline, then scrubbed with acetone and dried at 80 to 100 degrees Celsius or dried with a hair dryer. After treatment, assemble in order, keep the pump core and pump bottom perpendicular to the pump cavity, and adjust the nozzle clearance according to the original requirements.

6. When the water evaporates and dries, the pump core is installed, new diffusion pump oil is added, and the body is installed, the water pipe is connected, and the electric furnace plate is installed, then the pump can be started up again.

7. Pay attention to leak detection before starting up again. The method is: start the maintenance pump, close the door, and after several minutes, observe the vacuum degree, and check whether the joint leakage sealing gasket, or crush sealing ring. Remove the risk of air leakage before heating, otherwise the diffusion pump oil will burn, unable to enter the working state.

Compound Molecule Pump TYFB-1600