1) Low temperature adsorption pump suction, improve chamber vacuum: low temperature adsorption pump is the use of activated carbon or molecular sieve and other adsorbents, at low temperature has a strong ability to absorb gas to get vacuum. The pump structure is simple, no vibration, the pump and the pumped space can be very close, and the pumping speed. Adsorption pump can vacuum helium, hydrogen, neon and other gases. After the adsorbent is saturated, the adsorbent can be regenerated by heating up and decompressing.
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