Ion injection

- Dec 07, 2019-

Ion injection

The ion beam with energy of 5 ~ 500keV directly bombards the surface of the workpiece. Since the ion energy is quite large, ions can drill into the surface layer of the processed workpiece, change the chemical composition of the surface layer, and thus change the mechanical and physical properties of the surface layer of the workpiece.

This method is not limited by temperature, which element and particle size are injected, and can inject different ions (such as phosphorus, nitrogen, carbon, etc.) according to different requirements. The injected surface element has good uniformity, high purity, and the injected grain volume and depth can be controlled, but the equipment cost is high, the cost is high and the productivity is low.

样品柜05

IKS PVD Electron beam optical coating machine,IKS-OPT2700, More details,welcome contact iks.pvd@foxmail.com