The structure of the vacuum system is the key to affect the tightness of the vacuum system and the leakage rate of the system, and the rationality of the vacuum system structure will directly affect the system tightness and the system leak rate.
1. The pipeline that are connected with the vacuum chamber by evacuating pipeline, gas supply pipe, adopts circular arc transition to make the gas flow unimpeded, but the convenience of cleaning must be considered.
2. The structure of various connectors in the vacuum chamber is designed to make the gas flow unimpeded and avoid clogging of the gas flow.
3. Grinding and polishing the inner surface of the vacuum system, the brighter the surface is, the less gas adsorption is, and the easier it is to obtain a vacuum.
4. Minimize the volume of the vacuum chamber and shorten the pipeline system.
The sealing form can be selected according to the degree of vacuum needed and the actual working needs.
After the seal has been water-cooled, its temperature is about 80°C, and individual parts can reach temperatures above 100°C. Therefore, we should choose the more ideal seal material.
For vacuum sealing rubber materials, in addition to requiring a smooth surface, no scratches, no cracks, but also require a low permeability and out-gassing rate, good heat resistance and oil resistance, but also have a certain degree of strength, hardness and elasticity Wait.