high-temperature baking desorption and degassing to improve chamber vacuum

- Mar 08, 2020-

1) high-temperature baking desorption and degassing to improve chamber vacuum: the vacuum system needs to obtain ultra-high vacuum above 10-9 torr, which can only be achieved by continuous pumping for several days or even weeks at room temperature. By heating and baking the vacuum system or some parts of the system, the desorption rate of gas molecules on the solid surface can be accelerated. The vacuum of the chamber is usually increased by 1-2 orders of magnitude after the baking has been reduced to room temperature.


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