Diffusion pump ultra-high vacuum unit
The ultimate vacuum degree of the ultra-high vacuum unit with diffusion pump as the main pump is 10-7~10-8Pa.
In order to reduce the influence of the backdiffusion of gas from the front stage of the diffusion pump and the backdiffusion of blocking mechanical pump oil on the ultimate vacuum degree, a diffusion pump with low pumping speed can be installed in the front stage of the diffusion pump to reduce the compression ratio and the back diffusion. If the titanium sublimation well is added above the inlet of the diffusion pump, the nitrogen partial pressure from the diffusion pump can be further reduced and the ultra-high vacuum of 10-11Pa can be obtained.
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