Design of vacuum chamber for vacuum coating equipment

- Jan 21, 2019-

Design of vacuum chamber for vacuum coating equipment


IKS PVD,High quality vacuum coating equipment, iks.pvd@foxmai.com

 

PVD10

Vacuum coating technology is to use physical or chemical methods in the vacuum condition, so that the object surface to obtain the required film body, vacuum coating technology according to the different methods divided into evaporation plating, sputtering plating, ion plating, beam deposition and molecular beam epitaxy, etc. This analysis of the coating equipment is magnetron sputtering coating.

 

Vacuum chamber is a main part of vacuum equipment, vacuum coating equipment vacuum chamber design is mainly considered the sealing and reliability, the structure must be reasonable, vacuum equipment material production is carried out in the vacuum chamber, the material has a small impact on the vacuum degree, the design can not be careless, to pay attention to some problems.

 

Using vacuum magnetron sputtering coating equipment generally adopts the structure of cylinder body, the structure to ensure the fast time, because of air pocket will slowly deflated, thus avoiding isolation cavity, the top vacuum system will add magnetron sputtering gun, in order to make the vacuum chamber and components have enough strength, ensure that under the action of external and internal do not produce the change of the shape, thickness need enough.

 

Welding is a key process in the manufacturing of vacuum chamber, to ensure that the vacuum chamber after welding will not produce leakage phenomenon, it is necessary to design a reasonable welding structure, improve the quality of welding, in the ultra-high vacuum of the inner wall roughness to polish the outdoor indoor surface is very bright and clean, it is necessary to pay special attention to the need to do a good job in preventing rust measures.