Dc superposition pulse bias

- Aug 28, 2020-

Dc superposition pulse bias
The main features
1. It has all the characteristics of unipolar pulse bias power supply.

2. During the pulse gap, the accumulated charge on the surface of the workpiece can be neutralized, thus reducing the ignition caused by the accumulated surface charge.
3. The fast turn-off ability in high-frequency inverter technology can effectively reduce the energy released by each lighting, even in the appearance of lighting, also can significantly reduce the workpiece surface damage degree.
4. The ion energy deposited on the workpiece surface during the pulse gap is very low.
5. The film forming speed and quality can be improved and controlled by adjusting frequency and duty cycle.
Dc superposition pulse bias
The main features
1. It has all the characteristics of unipolar pulse bias power supply.
2. Under dc and DC superimposed pulse mode, the problem of very low ion energy between unipolar pulse gaps is eliminated.

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