Conclusion oxygen flux plays an important role in the optical properties of TiO2 films. By controlling the oxygen flow to adjust the vacuum degree in the vacuum chamber, the peak spectral transmittance of TiO2 film increases with the decrease of the vacuum degree, and the refractive index and extinction coefficient increase first and then decrease with the decrease of the vacuum degree. When the vacuum degree is 2.0× 10-3pa, the prepared TiO2 film has a high transmittance in the visible spectral region, with a maximum transmittance of 92%, refractive index between 2.50 and 2.20, and extinction coefficient below 10-4. The correlation coefficient squared of the fitting curve and the results calculated by the envelope method is 0.999 46, and the Cauchy dispersion equation of refractive index is n()=2.17+6.12×104/ 2+ 2.98×108/ 4.
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