Characteristics of ion beam processing technology

- Dec 08, 2019-

Characteristics of ion beam processing technology

1. High machining accuracy

Ion beam processing is the most precise and micro machining technology at present. The accuracy of ion etching can be danami-scale, the accuracy of ion coating can be controlled at sub-micron level, and the depth and concentration of ion implantation can be controlled precisely.

2. No pollution of the environment

Ion beam processing is carried out in a vacuum and is particularly suitable for the processing of easily oxidized metals, alloys and semiconductor materials.

3. High machining quality

Ion beam processing is achieved by bombarding atoms on the surface of materials with ions. The machining stress and deformation are minimal, which is suitable for processing various materials and low-stiffness parts.


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