Bipolar pulse bias
The main features
1. The effect of negative pulse is the same as that of unipolar pulse bias power supply. The effect of positive pulse is mainly to attract electrons in plasma to neutralize the positive charge accumulation on the workpiece surface. Since the mass of the electron is much smaller than that of the ion and the acceleration is easy, the amplitude of the positive pulse is much smaller than that of the negative pulse, which is usually 10 ~ 100V. The current integration of the positive pulse and the negative pulse should be equal. So the power of a positive power supply is much less than the power of a negative power supply.
2. When the positive power voltage is zero, the bipolar pulse bias becomes the unipolar pulse bias.
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