Advantages of boride targets

- Dec 08, 2020-

Advantages of boride targets:

  1.  Easy control of process parameters
    You can see these compounds on the left
    Is not required to be filled with any reaction gas,
    Variable process parameters are less, and the process is easy to control.
    2. Color stability
    As shown in the left image, with the flow of argon gas
    The color of the membrane changes very little



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