Lumen size: Φ 1900 * 1300 mm
Cooling method: outer wall water cooling
Observation window: the furnace door is equipped with two observation Windows
Welding requirements: internal and external profile welding.
Sputtering target positions: 5 pairs of targets in the outer ring and 5 pairs of targets in the inner ring
Arc target location: 5-5 on both sides, a total of 10 targets
KF configuration excuse: to meet the normal use of 4 reserved
Surface treatment: the inner and outer walls are fully polished.
Maglev Turbo molecular pump
High vacuum gate valve
Machine details,kindly download please.