Nd-Fe-B（neodymium Iron Boron）ceramic Coating Production Line

2. Vacuum Chamber：W1650XL16400XH500mm

8. Rate of Deposition: <2.5µm per time,   0.5nm Precision

3.Loading Frame: W1050XL1050

9.Design:Vacuum chamber and process modularization design

4.Target Material: Twinned Target W110XL1050mm,or Twinned   Target Ф110XL1050mm

10.Process:Flow gauge and Valve   controlled process gas

5.Work-Piece:ceramic   chip, thickness are 2-15mm

11.Power   Source:380V 50Hz

6. Vacuum   Rang: ATM-6X10^-4 Pa

12.   External Flange: KF16 and KF25

13.Vacuum   System: Rotary pump, Roots pump and Molecular pump